Learn More
Revolution Semi-Automatic Wet Processor
- New
| Process | CLEAN |
|---|---|
| Manufacturer | RENA |
Small Footprint, Multi-Step Processing
RENA NA‘s Revolution multi-step wet processing systems combine easeof process control with a rotary robot design and precision engineeringto create powerful, flexible tools with minimal fab footprints.
|
Rotary Robot for MinimalFab Footprint • 2-5 position, 2-axis design • Multiple process tanks • 150-300mm wafers • Optional tank lids • Pressure or optical tank level monitoring • Quick dump rinse options |
Versatile • Multiple etch, strip and clean applications • Easy recipe configuration • Chemical spiking, dosing and fill options • Acid and solvent models • 2-5 process tanks • Integrated Marangoni dryer |
Performance and Yieldwith IDX Flexware • Flexible • Configurable • Precise • SECS/GEM compliant • Touch-screen interface • Simultaneous multiple lotsand recipes |
____________________________________________________________________________________________________________________________
Designed for ︓ Productivity • Safety • Reliability • Configurability • Low Cost • Maintenance Friendly
Contact
Contact Us
Phone inquiry
03-6423-0130
Operating hours: 9:00–17:30
(Excl. weekends, holidays & year-end)
Web inquiry
Contact form