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Product name Manufacturer Model Process Inch Vintage Other remarks
ULVAC SIV-500 DEPOSITION 6 2016
ULVAC SRH-420MC DEPOSITION 6
ULVAC ei-5 DEPOSITION 角基板 2006
ULVAC ei-5 DEPOSITION 角基板 2006
CANON MAS8220 ETCHER 6、8
YAMATO V1000X ETCHER 4
AMAT P-5000 ETCHER 6
TOK TCA-7822S ETCHER 6 2008
TOK TCE7822 ETCHER 8
ULVAC CD-300R ETCHER 2~6
ULVAC NE-950EX ETCHER 4 2014
ULVAC NE-5500 ETCHER 3
SEMITOOL SST-C-642-250 ETCHER 6 2004
VARIAN 160XP 6
NSD3000 CLEAN 4

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