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Revolution Semi-Automatic Wet Processor
- 新規装置
| 製程 | CLEAN |
|---|---|
| 廠牌 | RENA |
Small Footprint, Multi-Step Processing
RENA NA‘s Revolution multi-step wet processing systems combine easeof process control with a rotary robot design and precision engineeringto create powerful, flexible tools with minimal fab footprints.
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Rotary Robot for MinimalFab Footprint • 2-5 position, 2-axis design • Multiple process tanks • 150-300mm wafers • Optional tank lids • Pressure or optical tank level monitoring • Quick dump rinse options |
Versatile • Multiple etch, strip and clean applications • Easy recipe configuration • Chemical spiking, dosing and fill options • Acid and solvent models • 2-5 process tanks • Integrated Marangoni dryer |
Performance and Yieldwith IDX Flexware • Flexible • Configurable • Precise • SECS/GEM compliant • Touch-screen interface • Simultaneous multiple lotsand recipes |
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Designed for ︓ Productivity • Safety • Reliability • Configurability • Low Cost • Maintenance Friendly
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