| ID | Category | Equipment | Manufacturer | Model | Size |
| W080919018 | LITHOGRAPHY | STEPPER | CANON | i5+ | |
| W080926001 | DIFFUSION | WAFER_SORTER | AST | AG 2800 RTP | |
| W090115001 | LITHOGRAPHY | COATER_DEVELOPER | TEL | MARK-8 | 6 |
| W090213020 | LITHOGRAPHY | UV_CURE | USHIO | 6 | |
| W090213046 | LITHOGRAPHY | SCANNER | NIKON | SF120 | 8 |
| W090213028 | IMPLANTER | MIDDLE_CURRENT_I/I | NISSHIN | NH-20SR | 6 |
| W090213019 | METROLOGY | RESISTANCE_MEASUREMENT | KLA/TENCOR | VR-70 | |